Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842754 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Akira Takahashi, Takeshi Yasui, Hiroyuki Ogawa, Naoya Matsuura | 2017-12-12 |