Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9830705 | Image evaluation apparatus and pattern shape evaluation apparatus | Shinichi Shinoda, Yasutaka Toyoda, Tsuyoshi Minakawa | 2017-11-28 |
| 9696150 | Overlay error measuring device and computer program | — | 2017-07-04 |