Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9761407 | Ion beam device and emitter tip adjustment method | Hiroyuki Muto, Yoshimi Kawanami, Shinichi Matsubara | 2017-09-12 |
| 9640360 | Ion source and ion beam device using same | Shinichi Matsubara, Yoichi Ose, Yoshimi Kawanami, Noriaki Arai | 2017-05-02 |