Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831096 | Plasma processing method and plasma processing apparatus | Tsutomu Iida, Yuuzou Oohirabaru | 2017-11-28 |
| 9711375 | Plasma processing apparatus and plasma processing method | Tsutomu Iida, Koichi Yamamoto | 2017-07-18 |