Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9593034 | Method for producing iron-doped silica glass | — | 2017-03-14 |
| 9586850 | Method for producing titanium-doped silica glass for use in EUV lithography and blank produced in accordance therewith | Klaus Becker, Stephan Thomas | 2017-03-07 |
| 9568818 | Method for producing a blank of fluorine-doped and titanium-doped glass having a high silicic-acid content and a blank produced according to the method | Klaus Becker | 2017-02-14 |
| 9540271 | Blank made of titanium-doped silica glass and method for the production thereof | Klaus Becker, Stephan Thomas | 2017-01-10 |