Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9834468 | Optical component made of quartz glass for use in ArF excimer laser lithography and method for producing the component | — | 2017-12-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9834468 | Optical component made of quartz glass for use in ArF excimer laser lithography and method for producing the component | — | 2017-12-05 |