Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9783882 | Fine grained, non banded, refractory metal sputtering targets with a uniformly random crystallographic orientation, method for making such film, and thin film based devices and products made therefrom | Prabhat Kumar, Richard Wu, Shuwei Sun, Stefan Zimmermann, Olaf Schmidt-Park | 2017-10-10 |
| 9564299 | Methods of manufacturing large-area sputtering targets using interlocking joints | Scott Jeffrey Volchko, William Loewenthal, Stefan Zimmermann, Mark Gaydos | 2017-02-07 |