Issued Patents 2017
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852898 | Target for ultraviolet light generation, electron beam-excited ultraviolet light source, and production method for target for ultraviolet light generation | Yoshinori Honda, Hiroyuki Taketomi, Koji Kawai, Hidetsugu Takaoka, Takashi Suzuki | 2017-12-26 |
| 9837315 | Laser processing method and laser processing apparatus | Kenshi Fukumitsu, Naoki Uchiyama, Toshimitsu Wakuda | 2017-12-05 |
| 9728393 | Target for ultraviolet light generation, electron beam-excited ultraviolet light source, and production method for target for ultraviolet light generation | Yoshinori Honda, Hiroyuki Taketomi, Koji Kawai, Hidetsugu Takaoka, Takashi Suzuki | 2017-08-08 |
| 9711405 | Substrate dividing method | Yoshimaro Fujii, Kenshi Fukumitsu, Naoki Uchiyama | 2017-07-18 |
| 9553023 | Substrate dividing method | Yoshimaro Fujii, Kenshi Fukumitsu, Naoki Uchiyama | 2017-01-24 |
| 9548246 | Substrate dividing method | Yoshimaro Fujii, Kenshi Fukumitsu, Naoki Uchiyama | 2017-01-17 |
| 9543207 | Substrate dividing method | Yoshimaro Fujii, Kenshi Fukumitsu, Naoki Uchiyama | 2017-01-10 |
| 9543256 | Substrate dividing method | Yoshimaro Fujii, Kenshi Fukumitsu, Naoki Uchiyama | 2017-01-10 |