Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9567666 | Apparatus and method for making sputtered films with reduced stress asymmetry | Alexey Krasnov, Willem den Boer | 2017-02-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9567666 | Apparatus and method for making sputtered films with reduced stress asymmetry | Alexey Krasnov, Willem den Boer | 2017-02-14 |