Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9590056 | Semiconductor device comprising contact structures with protection layers formed on sidewalls of contact etch stop layers | Kai Frohberg, Marco Lepper | 2017-03-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9590056 | Semiconductor device comprising contact structures with protection layers formed on sidewalls of contact etch stop layers | Kai Frohberg, Marco Lepper | 2017-03-07 |