Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9633915 | Method of using dummy patterns for overlay target design and overlay control | Yue Zhou, Mert Karakoy | 2017-04-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9633915 | Method of using dummy patterns for overlay target design and overlay control | Yue Zhou, Mert Karakoy | 2017-04-25 |