Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9854658 | Extreme ultraviolet light generation apparatus | Masaki Nakano, Tsukasa HORI | 2017-12-26 |
| 9699877 | Extreme ultraviolet light generation apparatus including target droplet joining apparatus | Tsukasa HORI, Hiroshi Umeda | 2017-07-04 |