ES

Emily Shu

S( Semiconductor Manufacturing International (Shanghai): 2 patents #45 of 227Top 20%
Overall (2017): #155,550 of 506,227Top 35%
2
Patents 2017

Issued Patents 2017

Patent #TitleCo-InventorsDate
9706632 EUV light source and exposure apparatus Qiang Wu, Liwan Yue 2017-07-11
9665017 Method for reducing contamination in extreme ultraviolet lithography light source — 2017-05-30