Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9702698 | Angular velocity sensor and manufacturing method therefor | Takuma NAKANO | 2017-07-11 |
| 9688528 | Substrate for diaphragm-type resonant MEMS devices, diaphragm-type resonant MEMS device and method for manufacturing same | Takahiro Sano | 2017-06-27 |
| 9678335 | Mirror drive device and driving method thereof | — | 2017-06-13 |