Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9568824 | Actinic-ray- or radiation-sensitive resin composition, resist film therefrom and method of forming pattern therewith | Toshiya Takahashi, Hiroshi Tamaoki, Hidenori Takahashi | 2017-02-14 |