Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9735030 | Polishing compositions and methods for polishing cobalt films | Luling Wang, Deepak Mahulikar, Richard Wen | 2017-08-15 |
| 9735031 | Polishing compositions and methods for polishing cobalt films | Luling Wang, Deepak Mahulikar, Richard Wen | 2017-08-15 |
| 9583359 | Polishing compositions and methods for selectively polishing silicon nitride over silicon oxide films | Luling Wang | 2017-02-28 |
| 9558959 | Polishing compositions and methods for selectively polishing silicon nitride over silicon oxide films | Luling Wang | 2017-01-31 |