Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9761740 | Electromagnetic radiation micro device, wafer element and method for manufacturing such a micro device | — | 2017-09-12 |
| 9637377 | Method for forming a micro-surface structure and for producing a micro-electromechanical component | Jochen Quenzer, Kai Gruber, Stephan Warnat | 2017-05-02 |