Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9811004 | Exposure apparatus and device fabrication method | — | 2017-11-07 |
| 9640802 | Catalyst assembly and method of making the same | Jun Yang, Richard E. Soltis, Andrew Robert Drews, Andrea Pulskamp, James Waldecker | 2017-05-02 |
| 9608282 | Fuel cell having perforated flow field | Alireza Pezhman Shirvanian | 2017-03-28 |
| 9594312 | Processing apparatus, processing method, and device manufacturing method | — | 2017-03-14 |
| 9568836 | Exposure apparatus and device manufacturing method using same | Atsushi Suzuki | 2017-02-14 |