Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9656869 | Process for the preparation of trisilylamine from monochlorosilane and ammonia | Hartwig Rauleder, Ingrid Lunt-Rieg, Christian Goetz | 2017-05-23 |
| 9617155 | Production of trisilylamine from monochlorosilane and ammonia by use of inert solvent | Hartwig Rauleder, Christian Goetz | 2017-04-11 |