Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9771223 | Device and method for processing of wafers | Peter-Oliver Hangweier | 2017-09-26 |
| 9751698 | Device and method for processing wafers | Peter-Oliver Hangweier | 2017-09-05 |
| 9666470 | Receptacle device, device and method for handling substrate stacks | Erich Thallner | 2017-05-30 |
| 9653329 | Semiconductor treating device and method | — | 2017-05-16 |