Issued Patents 2017
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D805268 | Sponge for substrate cleaning | — | 2017-12-12 |
| 9824903 | Substrate cleaning apparatus | — | 2017-11-21 |
| D800401 | Roller for substrate cleaning | — | 2017-10-17 |
| D799768 | Roller for substrate cleaning | — | 2017-10-10 |
| D799129 | Sponge for substrate cleaning | — | 2017-10-03 |
| 9677811 | Substrate cleaning and drying apparatus | — | 2017-06-13 |
| D787143 | Sponge for substrate cleaning | — | 2017-05-16 |
| 9643216 | Cleaning device, method of manufacturing the same and substrate cleaning apparatus | — | 2017-05-09 |
| 9640384 | Substrate cleaning apparatus and substrate cleaning method | — | 2017-05-02 |
| 9630296 | Substrate processing apparatus | — | 2017-04-25 |