Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9632061 | Eddy current sensor and polishing method | Mitsuo Tada | 2017-04-25 |
| 9573245 | Polishing method | Yasumitsu Kawabata | 2017-02-21 |
| 9555517 | Film thickness signal processing apparatus, polishing apparatus, film thickness signal processing method, and polishing method | Hidetaka Nakao, Akira Nakamura | 2017-01-31 |