Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842732 | Substrate cleaning apparatus and substrate cleaning method | Koji Maeda, Soichi Isobe, Hideaki Tanaka | 2017-12-12 |
| 9704728 | Substrate cleaning apparatus and substrate cleaning method | Koji Maeda, Soichi Isobe, Hideaki Tanaka | 2017-07-11 |