Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9651867 | Compound and composition for forming lower film of resist pattern, and method for forming lower film using same | Jung-Youl Lee, Jae Woo Lee, Jae-Hyun Kim | 2017-05-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9651867 | Compound and composition for forming lower film of resist pattern, and method for forming lower film using same | Jung-Youl Lee, Jae Woo Lee, Jae-Hyun Kim | 2017-05-16 |