Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9789567 | Laser beam spot shape detection method | Kenji Asano, Keiji Nomaru, Joel Koerwer, Naotoshi Kirihara, Yudai Hata | 2017-10-17 |
| 9791411 | Processing apparatus including a three-dimensional interferometric imager | — | 2017-10-17 |
| 9616544 | Wafer inspection method and grinding and polishing apparatus | Hirohide Yano | 2017-04-11 |
| 9613415 | Protective film detecting apparatus and protective film detecting method | Yu KUDO, Tomoaki Endo, Yukinobu Ohura, Ayana Nakanishi, Senichi Ryo +1 more | 2017-04-04 |