Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9625809 | Method and system for forming patterns using charged particle beam lithography with variable pattern dosage | Akira Fujimura | 2017-04-18 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9625809 | Method and system for forming patterns using charged particle beam lithography with variable pattern dosage | Akira Fujimura | 2017-04-18 |