Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846761 | Mask design based on sensitivities to changes in pattern spacing | Te-Yu Liu, Ke-Ying Su, Hsien-Hsin Sean Lee | 2017-12-19 |
| 9575041 | Gas cross-sensitivity analysis method and system thereof | Yong-Yuan Ku, Ya-Lun CHEN, Chia-Jui Chiang, Yu-Hsuan Su | 2017-02-21 |