Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9802817 | Method for making suspended elements with different thicknesses for a MEMS and NEMS structure | — | 2017-10-31 |
| 9783407 | Method for making a suspended membrane structure with buried electrode | Sophie Giroud, Vincent Larrey, Jean-Philippe Polizzi, Marie-Helene Vaudaine | 2017-10-10 |