Showing 1–11 of 11 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Kenichi Yamaga | Tokyo Electron Limited | 2 |
| 1 | Masami Oikawa | Tokyo Electron Limited | 2 |
| 1 | Manabu Honma | Tokyo Electron Limited | 2 |
| #4 | Wenling Wang | Tokyo Electron Limited | 1 |
| #4 | Kiyoto Hayashi | Tokyo Electron Limited | 1 |
| #4 | Makoto TAKADO | Tokyo Electron Limited | 1 |
| #4 | Kohichi Orito | Tokyo Electron Limited | 1 |
| #4 | Hiroko Sasaki | Tokyo Electron Limited | 1 |
| #4 | Katsuaki Sugawara | Tokyo Electron Limited | 1 |
| #4 | Koji Yoshii | Tokyo Electron Limited | 1 |
| #4 | Hiroto Sato | Hamamatsu Photonics K.K. | 1 |