Showing 1–4 of 4 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Maarten Marinus Johannes Wilhelmus Van Herpen | Asml Netherlands B.V. | 5 |
| 2 | Jan Steven Christiaan Westerlaken | Asml Netherlands B.V. | 2 |
| 3 | Frank Smits | Airopack Technology Group B.V. | 1 |
| 3 | Evert Johannes Bunschoten | Pantarhei Bioscience B.V. | 1 |