VS

Vitaliy Shklover

CG Carl Zeiss Smt Gmbh: 1 patents #89 of 237Top 40%
📍 Heidenheim, DE: #6 of 24 inventorsTop 25%
Overall (2017): #203,824 of 506,227Top 45%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9703209 Reflective optical element for grazing incidence in the EUV wavelength range — 2017-07-11