SP

Sascha Perlitz

CG Carl Zeiss Smt Gmbh: 1 patents #89 of 237Top 40%
Overall (2017): #253,201 of 506,227Top 55%
1
Patents 2017

Issued Patents 2017

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9605946 Method for characterizing a structure on a mask and device for carrying out said method 2017-03-28