Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823119 | System and method for analyzing a light beam guided by a beam guiding optical unit | Florian Baumer | 2017-11-21 |
| 9720328 | Projection exposure system for microlithography and method of monitoring a lateral imaging stability | Armin Rauthe-Schoech, Ulrich Mueller | 2017-08-01 |