Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9733580 | Method for producing a reflective optical element for EUV-lithography | Alexey Kuznetzov, Michael Gleeson, Robbert W. E. Van De Kruijs | 2017-08-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9733580 | Method for producing a reflective optical element for EUV-lithography | Alexey Kuznetzov, Michael Gleeson, Robbert W. E. Van De Kruijs | 2017-08-15 |