Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9684252 | Optical element with an antireflection coating, projection objective, and exposure apparatus comprising such an element | Alexandra Pazidis | 2017-06-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9684252 | Optical element with an antireflection coating, projection objective, and exposure apparatus comprising such an element | Alexandra Pazidis | 2017-06-20 |