Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9791018 | Vibration isolation apparatus, method of isolating vibration, lithography apparatus, and method of producing device | — | 2017-10-17 |
YS
Yugo Shibata
Overall (2017): #181,044 of 506,227Top 40%
1
Patents 2017