Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9721747 | Grid, method of manufacturing the same, and ion beam processing apparatus | Masashi Tsujiyama, Yukito Nakagawa | 2017-08-01 |
| 9583304 | Processing apparatus and shield | — | 2017-02-28 |