Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837884 | Multi-phase linear motor with continuously wound coils in each phase | Yuqi Tang | 2017-12-05 |
| 9741594 | Substrate processing apparatus and substrate processing method for performing heat treatment on substrate | Katsumi Hashimoto, Manabu Nakanishi | 2017-08-22 |