Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9671704 | Vibration reduction apparatus, lithography apparatus and method of manufacturing article | — | 2017-06-06 |
| 9665108 | Vibration reduction apparatus, lithography apparatus, and method of manufacturing article | — | 2017-05-30 |
| 9599185 | Vibration control apparatus, lithography apparatus, and article manufacturing method | — | 2017-03-21 |