Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823587 | Lithography apparatus, stage apparatus, and method of manufacturing articles | Tadashi Kimura | 2017-11-21 |
| 9547242 | Lithography apparatus, and method of manufacturing article | Atsushi Ito | 2017-01-17 |