Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9779921 | Substrate processing apparatus | Yoshimitsu Shimane, Satoshi Uchino, Susumu Akiyama, Kazuaki Matsuo | 2017-10-03 |
| 9593412 | Deposition apparatus and electronic device manufacturing method | Kimiko Mashimo, Shinya Nagasawa | 2017-03-14 |