Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9690201 | Drawing method and method of manufacturing article | Kouichirou Tsujita | 2017-06-27 |
| 9583311 | Drawing apparatus, lithography system, pattern data creation method, drawing method, and method of manufacturing articles | Yoshihiro Hirata | 2017-02-28 |
| 9558916 | Lithography system and method of manufacturing articles | Yoshihiro Hirata | 2017-01-31 |