Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9632423 | Illumination device, exposure apparatus, adjusting method, and method for manufacturing object | Yoshikuni Yoneyama, Noboru Osaka | 2017-04-25 |
KH
Kentaro Hiruma
Overall (2017): #349,811 of 506,227Top 70%
1
Patents 2017