Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9579843 | Imprint apparatus in which alignment control of a mold and a substrate is effected | Shingo Okushima, Nobuhito Suehira, Kazuyuki Kasumi | 2017-02-28 |
| 9573319 | Imprinting method and process for producing a member in which a mold contacts a pattern forming layer | Shingo Okushima, Nobuhito Suehira, Kazuyuki Kasumi | 2017-02-21 |