Issued Patents 2017
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841673 | Imprint apparatus and article manufacturing method | Yusuke Tanaka | 2017-12-12 |
| 9682510 | Imprint apparatus and method of manufacturing article | Yusuke Tanaka | 2017-06-20 |
| 9594301 | Imprint apparatus and article manufacturing method using same | Tatsuya Hayashi, Yosuke Murakami, Noriyasu Hasegawa, Yusuke Tanaka | 2017-03-14 |
| 9568819 | Holding apparatus, imprint apparatus and article manufacturing method using same | — | 2017-02-14 |