HS

Hiromi Suda

Canon: 2 patents #837 of 3,775Top 25%
Overall (2017): #147,634 of 506,227Top 30%
2
Patents 2017

Issued Patents 2017

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
9733571 Illumination optical device, exposure apparatus, and method of manufacturing article — 2017-08-15
9557523 Focusing method, focusing apparatus, exposure method, and device manufacturing method — 2017-01-31