Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9772560 | Light source apparatus, illumination device, exposure apparatus, and device manufacturing method | — | 2017-09-26 |
HK
Haruna Kawashima
Overall (2017): #408,422 of 506,227Top 85%
1
Patents 2017