Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9823354 | Illuminance measuring system | Hisashi Isozaki, Akira Ooide | 2017-11-21 |
| 9666417 | Plasma processing apparatus and method for monitoring plasma processing apparatus | Masahiko Orimoto | 2017-05-30 |