Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9534888 | Detection apparatus, measurement apparatus, exposure apparatus, method of manufacturing article, and measurement method | — | 2017-01-03 |
AA
Akio Akamatsu
Overall (2017): #501,092 of 506,227Top 100%
1
Patents 2017