Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9850402 | CMP compositions and methods for selective removal of silicon nitride | Dmitry Dinega, Renhe Jia, Daniel Mateja | 2017-12-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9850402 | CMP compositions and methods for selective removal of silicon nitride | Dmitry Dinega, Renhe Jia, Daniel Mateja | 2017-12-26 |